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Cmos-mems
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This edition of "CMOS-MEMS" was originally published in the successful series "Advanced Micro & Nanosystems". The book examines the various routes and methods to combine electronics generated by the CMOS (complementary metal oxide semiconductor) technology with novel micromechanical parts. These one-chip solutions pair sensing or actuating elements with control, evaluation and calibration electronics for easy, standardized interfacing with computers and other conventional electronics for increased performance, reduced size, and cheaper production cost. Approaches such as building the MEMS or the CMOS parts first or last, fundamental and technological aspects as well as strategies leading to different types of functionalities are examined and presented in detail.§For the practicing engineer as well as MSc and PhD students on MEMS courses.
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